发明名称 WASTE WATER TREATMENT DEVICE AND METHOD
摘要 PROBLEM TO BE SOLVED: To reduce the burden of a waste water treatment and to lower the waste water treatment cost by separating the waste water from a production device to the one whose impurity concentration is higher than a reference value or the other whose impurity concentration is lower than the reference value, discharging the waste water higher in the impurity concentration after a specified waste water treatment, recovering the waste water lower in the impurity concentration, and reutilize it. SOLUTION: The waste water is stored in a waste water receiving tank 20. In the waste water of higher impurity concentration separated with a retaining tank 21, the waste water, for example, having >0.5 ppm TOC concentration obtained by a total organic carbon(TOC) meter is allowed to flow to a waste water tank 23 through a line 22. Next, it is treated with a waste water treatment unit 24, and is further treated with a waste water treatment unit 25 to be discharged to a river, or the like. The waste water having <=0.25 ppm TOC concentration in the waste water separated with the retaining tank 21, passes through a circulation line 30 to reach a recovered water receiving tank 31, is further treated with a treating unit 32, and subsequently is recovered through a treating unit 33 in a recoverable state.
申请公布号 JP2000176434(A) 申请公布日期 2000.06.27
申请号 JP19980352533 申请日期 1998.12.11
申请人 TOKYO ELECTRON LTD;TAISEI CORP;KURITA WATER IND LTD 发明人 KOMATSU HARUHIKO;SHINODA TOMOYUKI;HAYASHI TERUYUKI;KANEKO KIMIHITO;MURATA KOHEI;KAWAHARA MASATO;KUNUGI TOMOHIKO
分类号 C02F1/00;G01N33/18;(IPC1-7):C02F1/00 主分类号 C02F1/00
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