| 摘要 |
PROBLEM TO BE SOLVED: To improve the adhesion between a base metal and a diamond-like carbon film in the member and to prolong the service life thereof by coating the surface of a base metal in a member coated with a diamond-like carbon film with a metallic film consisting essentially of at least one kind selected from the group 5A (5 group) metals in the periodic table, coating the surface with an Si film and moreover coating the surface with a diamond-like carbon film. SOLUTION: As the group 5A metals in the periodic table, V, Nb and Ta are preferable, and, particularly, Ta is preferable. In the vicinity of the boundary of the base metal the base metal may be diffused, in the vicinity of the boundary of the Si film, Si may be diffused, the content of metal in the metallic film is >=75 atomic %, and it is formed preferably by a sputtering method. The Si film preferably lies in an amorphous state and may contain <=25% hydrogen. Preferably, the thickness of the intermediate layer composed of the metallic film and the Si film is controlled to 2 nm to 5μm in total, and the thickness of each film is 1 nm to 2.5μm. The thickness of the diamond-like carbon film is controlled to 1 to 10,000 nm, preferably to 10 to 3000 nm.
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