| 摘要 |
An insulating film is formed on a conductive substrate, a conductor film is deposited on the insulating film, and a plurality of first electrodes are formed by forming at least one groove in the conductor film. A transparent layer is so formed as to cover the first electrodes and bury the groove formed in the conductor film. A photovoltaic layer is formed on the transparent layer, and an ITO film is deposited on the photovoltaic layer. A plurality of second electrodes are formed by forming at least one groove in the ITO film in parallel with the groove formed in the conductor film. A groove or a hole extending through at least the photovoltaic layer is formed between the two parallel grooves, and a conductive material is filled in this groove or hole, thereby electrically connecting the first and second electrodes adjacent to each other. Since the groove for separating the adjacent first electrodes is buried with the transparent layer, no defects occur due to the step in the groove. Accordingly, it is possible to provide a series photovoltaic element array with a high conversion efficiency, a high yield, and a high reliability.
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