发明名称 |
Temperature sensor element and temperature sensor including the same |
摘要 |
The present invention provides a temperature sensor element having excellent heat resistance, quick heat response, stable resistance, and high reliability with a less variation in resistance against time. The temperature sensor element includes a thermo-sensitive film mainly composed of a heat sensitive material having electrical resistance varies depending on the temperature; a pair of electrode films arranged to measure the electrical resistance in the direction of the thickness of the thermo-sensitive film, a base plate mainly composed of a heat-resistant insulating material for supporting the thermo-sensitive film and the electrode films, an anti-diffusion film interposed between the thermo-sensitive film and the electrode film in the vicinity of the base plate, and a film mainly composed of a heat-resistant insulating material for covering the thermo-sensitive film and the electrode films except the lead-connecting terminals of the electrode films. The thermo-sensitive film is composed of an oxide of corundum crystalline structure represented by the formula of (Al1-x-yCrxFey)2O3, where 0.05</=x+y</=0.95, and 0</=y/(x+y)</=0.6, and the anti-diffusion film is composed of an oxide of corundum crystalline structure represented by the formula of (Al1-x-yCrxFey)2O3, where 0</=x+y</=0.95.
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申请公布号 |
US6081182(A) |
申请公布日期 |
2000.06.27 |
申请号 |
US19970970496 |
申请日期 |
1997.11.14 |
申请人 |
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. |
发明人 |
TOMOZAWA, ATSUSHI;FUJII, EIJI;TORII, HIDEO;TAKAYAMA, RYOICHI |
分类号 |
G01K7/22;H01C7/04;H01C17/30;(IPC1-7):H01L7/02 |
主分类号 |
G01K7/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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