| 发明名称 |
Thermal isolation plate for probe card |
| 摘要 |
A thermal isolation plate for a probe card comprises a stiff, generally annular plate made of a metal having good thermal conductivity. One surface of the plate has a low emissivity and the opposite surface has a low absorptivity. Preferably the surface of low absorptivity is a highly polished surface.
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| 申请公布号 |
US6081110(A) |
申请公布日期 |
2000.06.27 |
| 申请号 |
US19980164444 |
申请日期 |
1998.09.30 |
| 申请人 |
CREDENCE SYSTEMS CORPORATION |
发明人 |
MOORE, JAMES DAVID;HANNAN, JAMES M.;MCMULLIN, JEFFREY S. |
| 分类号 |
G01R31/26;G01R1/073;G01R31/28;H01L21/66;(IPC1-7):G01R31/02;G01R1/04 |
主分类号 |
G01R31/26 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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