| 摘要 |
PROBLEM TO BE SOLVED: To inhibit the heat generated from a heater for heating the inside of a crucible from being diffused to the outside, to secure a cooling section having sufficient cooling capacity for cooling the cell by improving heat efficiency and further to prevent reflector corrosion, or the like, due to Ga deposition on reflectors from being caused while inhibiting gaseous impurities from being caused by lowering the surface temperature of each of the reflectors, in the cell. SOLUTION: This molecular beam source cell is provided with: a molecular beam source container 12 for receiving a molecular beam source 16; a heating means 11 which is placed on the periphery of the molecular beam source container 12 and used for heating the molecular beam source 16; a first reflector 13 which is placed on the periphery of the heating means so as to cover the heating means 11 and at least the surface being on the side of the heating means 11, and which 13 consists of a radiant heat reflection material; and a second reflector 18 which is placed on the periphery of the first reflector 13 so as to cover at least the first reflector 13 and consists of a heat insulation material having lower thermal conductivity than that of the material of the first reflector 13.
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