Method of fabricating a data storage system head slider having an internal accelerometer

摘要

A data storage system head slider and a method of making the same. The head slider includes a slider body and an accelerometer formed integrally with the slider body. In preferred embodiments, the accelerometer includes a cavity-formed in the slider body. A structural beam extends over the cavity such that the structural beam deflects in response to acceleration of the head slider. A piezo transducer formed on the structural beam provides a transducer output signal indicative of a magnitude of the acceleration of the head slider.