| 摘要 |
PROBLEM TO BE SOLVED: To improve the evacuation characteristic of a vacuum vessel by a simple structure. SOLUTION: A flow straightening box 17 provided with plural gas passage holes 18 is set around an electrode 14 so that many exhaust ports are present around the electrode 14. Consequently, the evacuation around the electrode 14 is excellently performed although an exhaust pipe 12 is set only at one place. Accordingly, since the state of atmospheric gas around the electrode 14 is made uniform, the density and flow of the plasma produced around the electrode 14 are made also uniform, and the deposit on the surface of a product 16 is excellently removed by the plasma P.
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