| 摘要 |
PROBLEM TO BE SOLVED: To promote a vacuum state in a facility to be evacuated by providing a gas-liquid pump for pumping gas-liquid to the closed vessel and pumping the gas-liquid pressurized by the gas-liquid pump from a gas-liquid pumping port to the outside to being a closed vessel into a negative pressure state, and automatically sucking gas from the facilities to be evacuated via a gas suction port. SOLUTION: A gas suction port 3 of a closed vessel 1 incorporating a gas-liquid pump 2 is connected to external facilities 6 to be evacuated by a pipe, the closed vessel 1 is filled with gas and liquid, and a gas-liquid pump 2 including a pipe winding body 9 is rotated. In this case, a gas-liquid flow inlet 7 of a gas-liquid pumping device 8 in the start side of the pipe winding body 9 is immersed at every rotation, the gas and liquid are alternately made to flow therein, and the pressurized gas-liquid is pumped from a gas-liquid pumping port 5 to the outside. The inside of the closed vessel 1 is set to the negative state by this pumping so that the negative pressure allows a necessary quantity of the liquid to be supplied from a supply port, while allowing the gas to be automatically sucked from the facilities 6 to be evacuated via a gas suction port 3. This constitution can promote the vacuum in the facilities 6 to be evacuated.
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