发明名称 |
Carrier head including a flexible membrane and a compliant backing member for a chemical mechanical polishing apparatus |
摘要 |
A carrier head for a chemical mechanical polishing apparatus includes a flexible membrane, the lower surface of which provides a substrate-receiving surface. The carrier head includes a compliant backing member with a plurality of cells which contact an upper surface of the flexible membrane to improve vacuum-chucking of the substrate.
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申请公布号 |
US6080050(A) |
申请公布日期 |
2000.06.27 |
申请号 |
US19970001702 |
申请日期 |
1997.12.31 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
CHEN, HUNG;ZUNIGA, STEVEN M. |
分类号 |
B24B37/00;B24B37/04;B24B41/06;H01L21/304;(IPC1-7):B24B7/22 |
主分类号 |
B24B37/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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