发明名称 |
Mask and method for modification of a surface |
摘要 |
A surface of a substrate (3) is to be exposed to a medium (11) directed towards said surface and which modifies said surface. A mask (4) to be used therefor has at least one opening (9) through which said medium (11) is allowed to reach said surface. The opening (9) is located in a protrusion (10) of said mask (4) which is directed versus said surface.
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申请公布号 |
US6080513(A) |
申请公布日期 |
2000.06.27 |
申请号 |
US19980072534 |
申请日期 |
1998.05.04 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
BRUGGER, JUERGEN;DESPONT, MICHEL;VETTIGER, PETER |
分类号 |
G03F1/14;G03F9/00;(IPC1-7):G03F9/00 |
主分类号 |
G03F1/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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