| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for production a functionally gradient material capable of coating a base material with a functionally gradient thin film whose compsn. continuously changes in the thickness direction of the film and also capable of continuously forming a thin film at a high speed by executing plasma discharge in the vicinity of the atmosphere pressure without needing a high vacuum degree. SOLUTION: At the time of executing discharge plasma treatment in such a manner that, under a pressure near the atmosphere pressure, a base material 5 is arranged between a pair of counter electrodes 3, 4 so as to be continuously moved, and pulselike voltage in which the voltage rising time is <=100 μs, and an electric field intensity is 1 to 100 kV/cm is applied, the electric field intensity between the counter electrodes 3 and 4 is continuously changed along the running direction of the base material 5. |
