| 摘要 |
PROBLEM TO BE SOLVED: To obtain an ink jet head in which the substrate size is reduced, the mounting process is simplified while reducing the cost, and the counter electrodes are arrange at high density on a diaphragm while simplifying the process. SOLUTION: An ink jet head comprises a liquid chamber 130, a diaphragm 120, and an individual electrode 220 and performs recording by applying a drive voltage between a common electrode fixed to the diaphragm 120 and the individual electrode 220 to deform the diaphragm 120 with electrostatic force thereby ejecting an ink liquid drop from a nozzle 330. The individual electrode 220 is formed on a first conductivity type semiconductor substrate 210 having the opposite side provided with an electrode take-out pad 250 for applying a potential externally to the individual electrode 220. The individual electrode 220 is connected electrically with the individual electrode take-out pad 250 through a second conductivity type impurity diffusion layer 240 formed in the first conductivity type semiconductor substrate 210.
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