| 摘要 |
PROBLEM TO BE SOLVED: To prolong the service life by connecting heating resistors formed on a supporting substrate with an electrode layer and providing a protective layer covering the heating part of the resistors and an anti-charging layer having at least two layers formed on the protective layer thereby eliminating two layers of protective film for preventing short circuit due to a defect, e.g. pinhole. SOLUTION: A glaze layer 2 is formed of TaSiO or NbSiO on a supporting substrate 1 of ceramics, or the like, and a heating resistor layer 3 constituting a large number of resistors arranged in array is formed thereon. An electrode layer 4 constituting a common electrode or individual electrodes is formed on the resistor layer 3 and specified resistors are selected out of the large number of resistors constituted of the resistor layer 3 at the time of printing and then the ejected resistors are heated by supplying a current. When the resistor is supplied with a current from the electrode, the region sandwiched between the electrode layer 4 and the glaze layer 2 is heated as a heating part. Protective layers 5, 5' are made of an electric insulating material, e.g. SiON, and at least the heating part of the resistor layer 3 is covered thereby.
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