| 摘要 |
PROBLEM TO BE SOLVED: To produce an aluminum nitride matter sintered compact capable of sintering at <=1,700 deg.C and excellent in strength while having high heat conductivity. SOLUTION: This aluminum nitride matter sintered compact is based on aluminum nitride and contains at least 0.5-20 wt.%, in total, of a rate earth metal oxide (RE2O3) and an alkaline earth metal oxide (OR) in an RO to RE2O3 ratio of 0.2-0.5 and 0.1-5.0 wt.%, in total, of silica (SiO2) and alumina (Al2O3). The grain boundary phase of the aluminum nitride grains contain a YAG type crystal phase and an alkaline earth metal oxide-alumina base crystal phase. The ratio (Y/RA) of the peak intensity Y of (2, 1, 1) faces in the YAG crystal phase to the peak intensity RA of (2, 2, 0) faces in a phase which has an alkaline earth metal oxide to alumina molar ratio of 1:1 in the alkaline earth metal- alumina base crystal phase is 3-15. The sintered compact has >=530 MPa three- point bending strength. |
