Acceleration actuated microswitch

摘要

A acceleration actuated microswitch that accurately detects accelerations in various directions is provided. A mass is supported by first beams in a space defined in a silicon substrate. The mass can be reciprocated in a direction perpendicular to the silicon substrate. A pair of second beams extend from the mass. Each second beam includes an electrode layer. A cover is secured to the silicon substrate. A pair of steps are formed in the inner surface of the cover. A pair of fixed contacts is located on each step. Each pair of contacts faces a corresponding electrode layer. When an acceleration having a certain magnitude is applied to the switch, the first beams are vibrated and the electrode layers contact the steps, which closes the switch.