Method for milling a transmission electron microscope test slice

摘要

A focused ion beam (FIB) is used to mill a test slice to form an observable wall for a transmission electron microscope (TEM). A slanting angle theta of the observable wall surface is automatically formed. The method for milling the test slice includes the following steps: The first step is to measure the slanting angle theta . The next step is to tilt the test slice with the slanting angle theta in both a counterclockwise direction and a clockwise direction and to perform FIB milling so that the TEM observable wall has a uniform thickness. Furthermore, during the FIB milling, an aperture in the TEM observable wall serves as a milling stop signal.