发明名称 |
Electrophotographic patterning of thin film circuits |
摘要 |
Amorphous silicon thin-film transistors on glass foil are made using exclusively electrophotographic printing for pattern formation, contact hole opening, and device isolation. Toner etch masks are applied by feeding the glass substrate through a laser printer or photocopier, or from laser-printed patterns on transfer paper. This all-printed patterning is a low-cost, large-area circuit processing technology, suitable for producing backplanes for active matrix liquid crystal displays.
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申请公布号 |
US6080606(A) |
申请公布日期 |
2000.06.27 |
申请号 |
US19960621582 |
申请日期 |
1996.03.26 |
申请人 |
THE TRUSTEES OF PRINCETON UNIVERSITY |
发明人 |
GLESKOVA, HELENA;SHEN, DASHEN;WAGNER, SIGURD RICHARD |
分类号 |
G02F1/1343;G02F1/1368;H01L21/336;(IPC1-7):H01L21/00;H01L21/20 |
主分类号 |
G02F1/1343 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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