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发明名称
摘要
申请公布号	JP3057570(B2)	申请公布日期	2000.06.26
申请号	JP19890344994	申请日期	1989.12.27
申请人		发明人
分类号	F04B43/02;F04B7/00;F04B43/067;(IPC1-7):F04B43/02;B05C5/00;H01L21/312	主分类号	F04B43/02
代理机构		代理人
主权项
地址

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