| 摘要 |
PURPOSE: An electronic part testing apparatus is provided to control a temperature of electronic parts exactly although the electronic parts are self fevered at testing. CONSTITUTION: An electronic part testing apparatus comprises a cooling unit(27) which is filled in a position head(24) located around a lower part of a vacuum absorption hole(25). A temperature sensor(28) is disposed around the cooling unit(27), and directly and indirectly measures a temperature of an integrated circuit chip(22) cooled by the cooling unit(27). A temperature signal measured by the temperature sensor(28) is transferred to a control apparatus, and thus a cooling output of the cooling unit(27) is controlled so as to control a self fever of the integrated circuit chip(22).
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