APPARATUS FOR IRRADIATING ULTRAVIOLET RAY OF LIGHT

摘要

PURPOSE: An ultra violet ray irradiating apparatus is provided to improve a uniformity of a surface processing by approaching the amount of ultra violet rays of light with regard to a surface of the processed. CONSTITUTION: An ultra violet ray irradiating apparatus comprises a lamp house(12) which has a dielectric barrier discharge lamp(11). The lamp house(12) is charged with inactive gas such as nitrogen or argon. The dielectric barrier discharge lamp(11) emits ultra violet rays of light from a circumference plane. A light penetration member(13) is installed at a lower plane of the lamp house(12). The lamp house(12) has a reflection mirror(14) which focuses light irradiated upward and in a side direction of the lamp(11) on the processed(W). A lighting filter(15) is installed at an upper part of the light penetration member(13). Below the lamp house(12) is disposed a circular turn table(16) for loading and fixing the processed(W). The turn table(16) is rotated by a rotation motor(18) and is ascended and descended by an ascent and descent unit(17).