| 摘要 |
PURPOSE: A magnetic lens is provided to generate a focusing of improved charged particle beam, and to generate improved high-resolution imaging. CONSTITUTION: A magnetic lens comprises a magnetic piece(40) of a doughnut-type channel shape which has an internal yoke(42), an external yoke(44) and a winding(46) existing inside a channel. Lens external and internal electrodes(50,60) are formed in the internal and external yokes(42,44) so as to be protruded toward a sample(5). The lens external electrode(50) is attached at end part and at a bottom part of the external yoke(44), and has a cylindric outside part(55) and a flat-type horizontal inside part(56) which is located at a plane in a parallel with the sample(5). A hole(52) is provided at the outside part(55) to attach the electrode(50) at the yoke(44) by use of a screw. An opening(57) is limited at the inside part(56). The lens internal electrode(60) is attached at a bottom plane and at an end part(51a) of the internal yoke(42). A hole(63) is formed to penetrate an outside part(62) of the electrode(60), and an inside part(66) of the electrode(60) has an opening(67).
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