| 摘要 |
<p>PROBLEM TO BE SOLVED: To uniformly and quickly apply a chemical liquid on the whole surface of a substrate by providing a slit nozzle with an arc opening edge and forming a jet pattern of the chemical liquid jetted out of an opening edge and formed of a stream line extending in the discharge direction and a uniform rate line along an arc curved face. SOLUTION: An aqua-knife structure is formed of a slit nozzle, and in a wet treatment device in a liquid crystal panel manufacturing device, chemical liquids such as a photoresist, a developing liquid and others are discharged out of the slit nozzle onto a substrate as a material to be treated. In that case, the slit nozzle with its slit (opening edge) 6 is formed into an arch curved upward and downward when viewed from the front in the direction crossing perpendicularly the forward moving direction of the substrate is adopted as an aqua- knife 1. A discharge pattern of the chemical jetted out of the slit 6 is formed of a stream line 15 extending straight and an arc uniform rate line 16 by the arrangement, and the chemical liquid is spread radially and applied quickly and uniformly on the whole of substrate surfaces.</p> |
