MICRO INJECTING DEVICE AND PRODUCING METHOD THEREOF

摘要

PURPOSE: A micro injecting device and a producing method thereof are provided to prevent damage such as wrinkling by dispersing the stress given to a main operation part that is a structurally weak part of the entire region of a membrane. CONSTITUTION: A metal film(24) having excellent stretching force is formed in the main operation part of a membrane(20). An organic film(21) having excellent malleability is formed thereunder. The tension given to the metal film by the vapor pressure of a heating chamber(4) is transmitted to the organic film and then dispersed properly. Thus, the tension is removed. Thereby, the prompt response property to the generation of the vapor pressure of working solution is maintained even though the membrane is not transformed.