| 摘要 |
PURPOSE: An electro-probe micro analyzer is provided, to be analyzed in high precision by the smaller acquisition of coordinate values. CONSTITUTION: The electro-probe micro analyzer (1) which analyzes the atoms of sample surface by using the specific X-ray emitted from the sample (S) by radiation of electron rays, is provided with an operation function which forms the equivalent line of z-axis coordinate values within the analysis range (2A) and calculates the range of z-axis corrected values (2C) which are distinguished by the equivalent line, and controls the z-axis position of samples (S) to satisfy the analysis height of sample surface based on the z-axis corrected values. Also the electro-probe micro analyzer (1) is provided with an operation function which calculates the corrected value of height of the line which passes the center position of height distribution of sample and calculates the three dimensional corrected value whose rotation center is the center position of the height distribution by using the corrected value of height, and controls the z-axis position of samples (S) to satisfy the analysis height of sample surface based on the z-axis corrected values obtained from the three dimensional corrected value.
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