发明名称 PRODUCTION SIMULATION SYSTEM
摘要 <p>PROBLEM TO BE SOLVED: To realize an efficient production simulation for semiconductors or the like. SOLUTION: A MES data control section 10 acquires production system data from a production system which controls production lines in a factory, and the production system data are stored as the acquired MES data in the MES data control section 10, and a MES data edition/insufficient data input section 12 is capable of editing the acquired MES data or adding necessary data to the acquired MES data to do a simulation. By this setup, a simulation can be carried out effectively, taking advantage of production system data which a production system possesses.</p>
申请公布号 JP2000173882(A) 申请公布日期 2000.06.23
申请号 JP19980348663 申请日期 1998.12.08
申请人 TOSHIBA CORP 发明人 HOKIBARA SHINICHI;KATO AKIRA;FUKUDA ETSUO
分类号 B23Q41/08;B65G61/00;G05B15/02;G05B19/418;G06F19/00;G06Q50/00;G06Q50/04;H01L21/00;(IPC1-7):H01L21/00;G06F17/60 主分类号 B23Q41/08
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