发明名称 SAMPLE OBSERVING METHOD AND MANUFACTURE OF SAMPLE OBSERVING DEVICE
摘要 PROBLEM TO BE SOLVED: To quickly search the position of a sample when the desired observation position on the sample is not in the field of observation. SOLUTION: When an observation image is image picked up by a microscope, it is memorized and indicated for the purpose of observation of the surface of a sample retained by a sample retaining means which can be moved relatively with the microscope, the sample and the microscope are relatively moved, the peripheral image, which is the image on the region, containing a part of the observation image, or the region adjacent to the observation image, is image picked up and stored, and the stored observation image and its peripheral image are compounded, and the image, having a visual field wider than the visual field of the microscope, is displayed.
申请公布号 JP2000173912(A) 申请公布日期 2000.06.23
申请号 JP19980358386 申请日期 1998.12.03
申请人 CANON INC 发明人 MORIMOTO OSAMU
分类号 H01L21/027;G03F9/00;(IPC1-7):H01L21/027 主分类号 H01L21/027
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