| 摘要 |
<p>PROBLEM TO BE SOLVED: To simply increase the accuracy of the count of pellets by a method wherein a wafer in which a plurality of the pellets are dividedly adhered on a dicing tape is arranged on the original mounting surface of an image scanner and a lighting unit for back light is arranged on the rear of the dicing tape adhered with the wafer. SOLUTION: The wafer 3 is placed on an image scanner 2 having an original- mounting surface 1 formed of glass, and the water 3 is mounted on a ring 5 with a dicing tape 4 adhered. The wafer 3 is diced by dicing lines, and a number of pellets arranged in a lattice type are formed on the ring 5. These pellets are adhered on the dicing tape 4 struck on the cylindrical ring 5. A lighting unit 8 for back light is arranged on the upper part of the ring 5. The image scanner 2 is connected with a personal computer inserted with a board and a high-resolution image is taken in a memory by a software of the scanner 2 on the computer.</p> |
