摘要 |
PROBLEM TO BE SOLVED: To enable stable oblique grinding without tilting an array base, in an oblique working device for a waveguide chip, by forming an inclined surface on the upper face of the array base and fixing the waveguide chip on this inclined surface. SOLUTION: In a device for working the end face of a waveguide chip (the chip) 10, which is fixed on the upper face of a rectangular parallelopiped array base 20, by means of a grinder 50 having a perpendicular working surface, an inclined surface 24 is formed on the upper face of the array base 20, the chip 10 is fixed on this inclined surface 24. A notch 22 with a right angled triangular cross section for example is provided on the upper face of the rectangular parallelopiped array base 20. Assuming that the angle formed by the upper face of the array base 20 and the inclined surface 24 is a desired tilt angle of X deg., and that the width w of the notch 22 is the same as the width of the chip 10, a good stability can be obtained when the chip 10 is set. Then, the chip 10 is set on the inclined surface 24 in this notch 22. Concurrently, the dimension of the notch 22 is designed so that the tip of the chip 10 projects slightly from the array base 20. |