| 摘要 |
PROBLEM TO BE SOLVED: To improve a voltage resistance by forming a film composed of a specified composition of Ba, Ca, Zr, Ti and O on a conductive substrate having a Ti element at least on its surface by a water/heat synthesizing method. SOLUTION: A conductive substrate having a Ti element at least on its surface is heated in an alkaline soulution containing Ba ion, Ca ion, Zr ion, Ti ion of 0.1 mol/l or less. The heating temperature is preferably in a range of 80-200 deg.C. Accordingly, a Ba1-xCaxZryTi1-yO3 film is formed on the substrate, wherein relations of 0<x<0.2; 0<y<1 are established. For the alkaline solution, an hydroxide of Ba or Ca, or NaOH or the like can be used. The solution having a strong alkaline characteristic such as pH 12 is desirable for crystallization. After the formation of a film, e.g. it is subjected to ultrasonic wave washing is performed in pure water, and then it is dried at 100-200 deg.C over two hours.
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