PRODUCTION OF TITANIUM OXIDE-COATED PLASTIC FILM AND TITANIUM OXIDE-COATED PLASTIC FILM

摘要

PROBLEM TO BE SOLVED: To provide a titanium oxide-coated plastic film having little absorption and excellent transparency by vapor depositing metal titanium on a plastic film through plasma in an oxygen atmosphere. SOLUTION: The titanium oxide film is formed by vaporizing a metal titanium material 006 held in a crucible 007 disposed on the lower part of a vacuum chamber 001 at <=1×10-5 Torr vacuum degree with electron beams emitted from an electron gun 008. The vaporized particles are passed through a plasma region of oxygen between the plastic film 002 and crucible 007 introduced from a gas inlet 010 and is deposited at an incident angle (20 deg. to 60 deg.) caused by a shielding plate 011 to form a titanium oxide film on the plastic film 002. The plastic film 002 is supplied from a releasing machine 003 along a cooling can 005 to above an RF coil 009, where the titanium oxide film is formed.