| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a flow rate detecting mechanism in which a stabilized layer flow can be obtained even if the pressure on the inlet side of a sensor section is varied while enhancing the substitution characteristics of gas significantly and the flow rate of gas can be regulated finely while improving compatibility with the sensor. SOLUTION: A tubular holder 2 is inserted into a hole H made in a block B, a gap 4 is provided by an annular groove in the outer circumferential part at the inlet end of the holder 2, a through hole 7 for conducting gas to the annular groove 4 is made at the inlet end of the holder 2, a bypass channel P1 inserted with a resistive matter 13 is formed in the holder 2, a gas introduction hole 8 communicates with the gap 4, a gas lead-out hole 9 communicates with the downstream side of the holder 2, and a sensor channel pipe 10 is provided across a gas introduction hole 8 and the gas lead-out hole 9. Gas flowing from the inlet side of the holder 2 collides against the resistive matter 13 to be divided into a part conducting through the through hole 7, the annular groove 4, the gas introduction hole 8, the sensor channel pipe 10 and the gas lead-out hole 9 and the remainder conducting through a bypass channel P2 in the holder 2.</p> |
