| 摘要 |
<p>PROBLEM TO BE SOLVED: To form an active matrix circuit and peripheral logic circuits for driving the same using a crystal TFT on one and the same substrate. SOLUTION: A semiconductor device has several thin film transistors including a semiconductor film formed on an insulating substrate. The semiconductor film of at least one thin film transistor has alignment in the direction of the planes (111), (220) and (311). The ratio of the reflected intensity of the plane (111) to the sum of reflection intensities of the planes (111), (220) and (311) is 90% or more. The semiconductor film having alignment in the direction of the planes (111), (220) and (311) grows its crystal in the direction parallel to the insulating substrate.</p> |
