| 摘要 |
<p>PROBLEM TO BE SOLVED: To prevent a plate for being transported from attaching dust by fixing terminals of first and second arms of a handling tool with a maintaining part which maintains a side part of the plate for being transported, and by junctioning the first and the second arms by making a rotating fulcrum axis as a pivot. SOLUTION: A pair of maintaining gap blocks 5 are junctioned by having an interval which is contained in a width of a photo mask substrate 1 and in an internal width of a case 2 at the terminal of arm 6 which corresponds to first and second arms of a handling tool which is used when the photo mask substrate 1 is taken out from the case 2 and the photo mask substrate 1 is maintained. Additionally, the arm 6 is junctioned with an upper and lower hand plate 7, the arm 6 and the upper and lower hand plate 7 are made in such a junction condition as to locate at the outside of a region on the photo mask substrate 1 and each arm 6 is junctioned by making the rotating fulcrum axis 8 as a pivot by junctioning each upper and lower hand plate 7 by the rotating fulcrum axis 8 which is equipped with a resin bush in outer part.</p> |
