| 摘要 |
PROBLEM TO BE SOLVED: To provide a wavelength characteristic measuring device having a shutter causing no deterioration of optical parts or an actuator. SOLUTION: In this wavelength characteristic measuring device 5 including instruments 18, 19 for measuring wavelength characteristics of an excimer laser device, and a monitor box 22 for housing the instruments 18, 19 therein, an actuator 44 for opening/closing a shutter 39 for intercepting laser light 1 entering the instruments 18 is provided in an exterior of the monitor box 22. Accordingly, an impurity gas generated from the actuator is prevented from entering the monitor box 22, so that deterioration of optical parts can be prevented. |
