| 摘要 |
PROBLEM TO BE SOLVED: To carry an object to be carried such as a substrate while avoiding an interfering object quickly. SOLUTION: A movable space SP is defined by two degrees of freedom YZ being related to interference out of each degree of freedom of a carrying robot. Within the movable space SP, the coordinates values of region critical points H1, H2, H3, and H4 that are the top of an interference region are set in advance within the movable space SP. According to the setting of the coordinates values of the region critical points H1-H4, the inside of the movable space SP is divided into a plurality of zones A, B, C, D, and E. When a carrying robot is to be moved actually, a current position P1 that becomes a starting position and a target position P2 are acquired. Then, a virtual straight locus L1 connecting the current and target positions P1 and P2 is obtained. Also, by comparing intersections M1 and M2 between each zone boundary and the straight locus L1 and the coordinates values of the region critical points H1 and H2, it is judged whether the straight locus L1 passes the interference region or not. Then, if it is judged that the straight locus L1 passes the interference region, the shortest carrying locus SL via the region critical points H1 and H2 is set. |
