发明名称 |
Method of manufacturing indiffused optical waveguide structures in a substrate |
摘要 |
An indiffused optical waveguide in a substrate 1 is formed by etching a metal layer 7 deposited on a substrate 1 and covered with a resist layer 8 mask pattern 4 by a chemical/physical etching technique to expose substrate 1 and by diffusing the remaining metal layer structure into the substrate by a heat treatment.
|
申请公布号 |
NZ336142(A) |
申请公布日期 |
2000.06.23 |
申请号 |
NZ19990336142 |
申请日期 |
1999.06.04 |
申请人 |
PIRELLI CAVI E SISTEMI SPA |
发明人 |
CARMANNINI, CARLO |
分类号 |
G02B6/12;G02B6/13;G02B6/134;G02B6/136;G02F1/035;G02F1/125;(IPC1-7):G02B6/136 |
主分类号 |
G02B6/12 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|