| 摘要 |
PROBLEM TO BE SOLVED: To obtain a SQUID microscope which prevents a DC-SQUID and a sample from being damaged due to their contact when waterdrops are forzen by a method wherein an elastic material is used for a device mounting board and the device mounting board is fixed directly to a holder. SOLUTION: A DC-SQUID 11 is cooled due to thermal conduction by a first cooling device 21 via a device mounting board 12 made of an elastic material and via a holder 14. The first cooling device 21 is made of oxygen-free copper, and it is cooled while a refrigerant is passed through the inside. The holder 14 holds the device mounting board 12 on which the DC-SQUID 11 and a terminal base 16 are mounted while a proper angle is kept, and it is used to fix the device mounting board 12 to the first cooling device 21. An angleθat which the device mounting board 12 is held is decided by the positional relationship or the like between a bonding wire between the DC-SQUID 11 and the terminal base 16 and a sample 40. When it is required to cool the sample 40, the sample is cooled by a second cooling device 22. A magnetism distribution is measured in such a way that the DC=SQUID 11 is brought into contact with the sample 40 and that the sample 40 is scanned by a scanning stage 30 so as to acquire data.
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