发明名称 LAMINATE JIG
摘要 PROBLEM TO BE SOLVED: To compression-weld a green sheet laminate having cavities and holes communicating with the cavities by inserting a flat plate having a specified Young's modulus or more between a first tabular elastic body and a second elastic body having a shape fit to the cavities. SOLUTION: The laminate jig 1 for compression bonding a green sheet laminate 5 having cavities 6 and holes 7 communicating with the cavities 6 has a flat plate 4 having a Young's modulus of 8000 kg/mm2 or more between elastic bodies 2, 3. The plate 4 uses a metal plate of 0.2-1.0 mm thick. This prevents the elastic body 2 from excessively flowing to the elastic body 3 and hence from flowing into the holes 7 of the elastic body 3, thus eliminating the deformation failure around the holes 7 of the green sheet laminate 5.
申请公布号 JP2000174152(A) 申请公布日期 2000.06.23
申请号 JP19980348292 申请日期 1998.12.08
申请人 SUMITOMO METAL ELECTRONICS DEVICES INC 发明人 IKEDA TAKUJI
分类号 H01L23/02;G02B6/13;H01L23/08;(IPC1-7):H01L23/08 主分类号 H01L23/02
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