| 摘要 |
PROBLEM TO BE SOLVED: To improve the edge image of a surface shape and to improve the contrast between substances and topography, and the controllability of the contrast by radiating a primary electron to a sample, by acquiring a secondary electron discharged from a sample by two or more narrow-band secondary electronic spectra, by providing two narrow-band image signals, and by digitalizing and conmpositing the image signals. SOLUTION: A primary beam of a narrow-band SE SEM microscope is discharged from a source 41 having an accelerating voltage Vacc applied to itself. A sample 40 is retained by a voltage Vc. A detector 44 has a relatively weak attraction potential VA applied to the grid so as to attract a narrow-band SE. A detector 46 has a relatively weak repulsion force VB so as to repulse the low-speed SE and to let only high-speed SE pass through. This constitution can adjust the attraction potential VA and the repulsion potential VB till obtaining an optimal image.
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