| 摘要 |
PROBLEM TO BE SOLVED: To provide a compact integrated valve, excellent in temperature controllability. SOLUTION: In this integrated valve 1, a plurality of integrated units 2, 3, 4 are arranged and fixed on a base block 10. By channels 21, 22, 23, 24 which are intermittently formed on the base block 10, fluid to be controlled has a fluid control line capable of flowing in each integrated unit 2, 3, 4. The base block 10 has temperature adjusting channels 21, 22, 23, 24 allowing temperature adjusting fluid to flow for adjusting a temperature of fluid to be controlled flowing in the fluid control line.
|
