Particle deposition apparatus

摘要

An electrostatic chuck 910 has a conductive layer 920, with a dielectric layer 930 on top of it. An upper conductive layer 940 may protrude outward form the dielectric layer, or may be embossed into it. The chuck is used for electrostatically attracting charged particles, which are supplied from a dispenser adjacent to the chuck. A sensor (not shown) measures the amount of charged particles adhering to the chuck. The chuck is used to deposit particles of a pharmaceutical onto a substrate, the substrate being attached to the chuck.