MANUFACTURE OF OBJECTIVE LENS, OPTICAL HEAD AND PHASE COMPENSATOR

摘要

PROBLEM TO BE SOLVED: To eliminate the distributing nonuniformity of a polarizing state caused by the total reflection on a solid immersion lens when the solid immersion lens is adopted as an objective lens. SOLUTION: The objective lens 1 is constituted of a lens 5 converting incident light to convergent light, a phase compensator 6 arranged in the optical path of the incident light converted to the convergent light by the lens 5 and the solid immersion lens 7 formed so that the incident light passed through the compensator 6 is made incident on it. Then, the compensator 6 is constituted so that phase difference is produced between the (p) polarized light component and the (s) polarized light component of the incident light and it becomes different according to the inclination angle of a light beam passed through the compensator 6. Besides, the distributing nonuniformity of the polarizing state caused by the total reflection on the lens 7 is corrected by the compensator 6.