| 摘要 |
PROBLEM TO BE SOLVED: To obtain an angular velocity sensor with a large detection output in a simple structure by providing, on a piezoelectric substrate for transmitting elastic surface waves, a drive electrode, a detection electrode and an elastic surface wave amplifying element for converting a change in transmission speed of the elastic surface waves into a change in amplification. SOLUTION: On a piezoelectric substrate 1 made of lithium niobate or the like for transmitting elastic surface waves, a drive electrode 2, a detection electrode 3 and an elastic surface wave amplifying element 30 for converting a change in transmission speed of the elastic surface waves into a change in amplification are provided wherein they are made of a metal material such as Au and Al or an alloy material and formed by photo etching or the like. The amplifying element 30 comprises a semiconductor 4 such as Si, an insulation film 7 such as SiO for preventing diffusion of the semiconductor 4 and the substrate, an electrode 6 made of Al or the like for applying an electric field, and a protective film 8 for protecting the semiconductor 4 against moisture in the air. The elastic surface waves with Coriolis force applied are amplified by the amplifying element 30 to be increased in a detection output of angular velocity. |
