| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a planar motor device for suppressing heat effects to a surrounding environment. SOLUTION: When a current is supplied to an armature coil 34 that faces a magnetic pole unit 40, a wafer stage WST is driven along a traveling surface 32a by electromagnetic force. As a result, each armature coil 34 where a current is supplied generates heat. The armature coil 34 is arranged along the traveling surface in a base 32, and a first fluid path 62, where a first fluid flows in a laminar flow state is provided at the traveling surface side of the armature coil 34, and a second fluid path 64 where a second fluid flows in a laminar flow state is provided at the opposite side to the traveling surface. Therefore, a temperature boundary layer is formed in the flow of the first fluid for effectively preventing the heat of the armature coil 34 from being transferred to the traveling surface. At the same time, the heat transfer rate between the second fluid and a stator yoke 58 increases, thus efficiently eliminating the heat of the armature coil 34 due to the second fluid.</p> |
