发明名称 PROCESS FOR ADHERING CRYSTALLINE SUBSTRATE HAVING DIFFERENT CRYSTAL LATTICES
摘要 PROBLEM TO BE SOLVED: To prevent the occurrence of an interface state, defects, and traps by a method, wherein a second substrate having a second crystal lattice struc ture is adhered to a first substrate having a first crystal lattice structure to manufacture an optical detector. SOLUTION: A stack 210 as a second substrate having a second lattice structure is adhered on a silicon substrate 205 as a first substrate having a first crystal lattice structure. The stack 210 forms an n--silicon layer 215, and an n-InGaAs 220, a layer of an InP 225, and a layer of silicon dioxide(SiO2) 230, and a gold-beryllium alloy 250 as a p-type metal sequentially laminated and formed thereon. A window 235 is formed in the SiO2 layer 230 within such a stack 210, and zinc is diffused in the inside thereof in order to form a p-n junction 240.
申请公布号 JP2000174325(A) 申请公布日期 2000.06.23
申请号 JP19990342723 申请日期 1999.12.02
申请人 LUCENT TECHNOL INC 发明人 SANGUHII PAAKU HYUI;LEVINE BARRY F;PINZONE CHRISTOPHER JAMES
分类号 H01L31/107;H01L21/02;(IPC1-7):H01L31/107 主分类号 H01L31/107
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