| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and device for easily detecting the penetration of a pick-pin into a sheet, so that allocation or tight-fitting of a damaged semiconductor chip to a predetermined position such as a supporting plate is prevented. SOLUTION: A pin 7a is made of a conductor for functioning as a terminal. A collet 9a is provided with, as one body, a terminal 13 for detecting sheet penetration. The pin 7a and the detecting terminal 13 are connected to a sheet penetration detecting circuit 14. When a semiconductor chip 4 is sucked with the collet 9a, electric conductivity between the pin 7a and the detecting terminal 13 is measured for judgement whether the pin 7a penetrates a sheet 2 or not.
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