| 摘要 |
PROBLEM TO BE SOLVED: To improve deposition resistance at a large capacity, by forming an arc electrode as a composite alloy composed of a specific wt.% of total of one or more of high melting point metals Cr, W, Mo, and Ta, a specific wt.% of a highly conductive metal Cu, and a specific wt.% or less of total of one or more of low melting point metals Te, Se, and Sb. SOLUTION: An arc electrode 1 and an electrode support portion 2 are integrated by melting a highly conductive metal. The arc electrode 1 is preferably a composite alloy composed of 30-80 wt.% of total of one or more of high melting point metals Cr, W, Mo, and Ta, 20-70 wt.% of the highly conductive metal Cu, and less than 0.1 wt.% (except 0) of total of one or more of low melting point metals Te, Se, and Sb. Thus, the electrode that easily separates even when it is deposited and has higher deposition resistance at a large capacity is provided, and uniform and dispersion of the low melting point metals is allowed by controlling atmospheric gas, infiltration temperature, and holding time.
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