| 摘要 |
<p>A method is provided that increases productivity to produce diamond heat sinks having precise dimensions and smooth edges with no defects or modified layer of low resistivity and capable of exhibiting improved insulation. According to this method, a diamond substrate is grooved by a laser beam, covered with a metalized layer alone or together with an adhesive layer, cut into pieces along the grooves by a diamond saw, and ground to remove the modified diamond formed on the groove sides when irradiated with the laser beam.</p> |
