Contactor for semiconductor devices, a testing apparatus using such contactor, a testing method using such contactor, and a method of cleaning such contactor

摘要

A contactor (10A) for semiconductor devices (20) includes a base unit (12A) for holding a semiconductor device (20) provided with a plurality of terminals and a wiring substrate (11A) provided with contact electrodes (14) at positions corresponding to at least some of the terminals (21). The contact electrodes (14) and the terminals are electrically connected when the wiring substrate (11A) is held on the base unit (12A). The contactor (10A) further includes a position maintaining force applying mechanism (17) for applying a position maintaining force between the base unit (12A) and the wiring substrate (11A) and a contact pressure applying mechanism (16) for applying a contact pressure between the semiconductor device (20) and the wiring substrate (11A). The position maintaining force applying mechanism (17) and the contact pressure applying mechanism (16) are operable in an independent manner.